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Following the feature size miniaturization of semiconductor wafers, micro-contaminants has become a serious threat to the manufacturing processes. To largely enhance the product yield, the manufacturer should establish an intact strategy on micro-contamination control.

MiTAP series provides an integrated and cost-effective solution on VOC monitoring system, targeting various applications in cleanroom

  1. Fab Environmental Control
    1. VOC baseline set-up and early alert system
    2. Bay-to-Bay cross-contamination verification
    3. Contaminants life cycle monitor and control
  2. FOUP Cleanness Check

  3. Filter Efficiency Check

  4. Purge Gas Quality Check

  5. Process Contamination Identification