As the sizes of semiconductor wafers become more miniaturized, micro-contaminants have also become a serious threat to the fabrication process. Manufacturers must establish comprehensive strategies to control micro contamination in order to increase product yield.
The MiTAP series of products offer cost-effective solutions to monitor the air quality inside cleanrooms.
- Fab Environmental Control
- VOC baseline settings and early warning system
- Cross-contamination verification between bays
- Contaminant life cycle assessment and control
- FOUP Cleanness Check
- Filter Efficiency Check
- Purge Gas Quality Check
- Process Contamination Identification