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As the sizes of semiconductor wafers become more miniaturized, micro-contaminants have also become a serious threat to the fabrication process. Manufacturers must establish comprehensive strategies to control micro contamination in order to increase product yield.

The MiTAP series of products offer cost-effective solutions to monitor the air quality inside cleanrooms.

  1. Fab Environmental Control
    1. VOC baseline settings and early warning system
    2. Cross-contamination verification between bays
    3. Contaminant life cycle assessment and control
  2. FOUP Cleanness Check

  3. Filter Efficiency Check

  4. Purge Gas Quality Check

  5. Process Contamination Identification